Design characteristics of vacuum coating machine multi-rotary disc comparison equipment

1) The formulation of cylindrical shape, large diameter, and thin-walled structure of fixed cylinder 3 and the determination method of axial symmetry can ensure that it has sufficient strength and bending stiffness, and at the same time, it can also prevent high-temperature magnetron sputtering The wear-resistant material pollutes the environment of its internal structural parts, ensuring the operational flexibility of the rotation of the rotating disc 15 .
2) The design scheme of the annular seated bearing 2 ensures the sealing performance and vertical angle of the seated bearing installation; expands the diameter specification of the shaft 1, increases the installation interval between the two rolling bearings in the seated bearing 2, and improves its own strength and bending rigidity , to ensure the bending stiffness of the shaft 1 after the whole process of rotation, the flexibility of the rotation operation of the rotating disk 15, and the consistency of repeated parts.
3) Carrying the interchangeable tissue, according to the diameter of the expanded support plate 16, the reasonable total area of the tissue in the plane view angle is enlarged, and a comparative piece with a large diameter (Φ26.5mm) can be installed, which is beneficial to the loop adjustment and improves the quality of the optical film ; The relative sheet 12 is made of sheet-type laminated glass as a comparative sheet module, and the comparative sheet adopts the three-dimensional accumulative installation method in the indoor space. The film is compared with the film, which solves the problem that the double-layer high-precision optical film is coated by the coating equipment, and the number of films is relatively small, which affects the number of superimposed layers and precision of the coating on the surface.
4) Cooperate with the positioning plate 6 and the slot-type optical coupler 17, recognize the three average 120° double slits on the positioning plate according to the slot-type optical coupler, and control the rotation of the motor to stop. The consistency of the precise positioning of the rotation of the shaft 1 is ensured repeatedly, and the rotating disc 15 is pushed to perform an accurate pulling-out posture.
5) The rotary sealing feed-in mechanism introduces the Wilson sealing mechanism 5, which not only ensures the sensitive rotation of the motor 9 to drive the shaft 1 according to the gear meshing, but also ensures the sealing effect of the vacuum chamber to the outside world. The optimized vacuum coating machine with multi-rotary discs is a relatively thin film equipment. Its characteristics are: (1) simple structure, high compressive strength, and good stability; Optical film; (3) Compared with the expansion of film diameter, the precision of plastic film supervision is improved, the requirements for hardware system are reduced, and the system software is very easy to complete the automatic control system; (4) The maintenance cost is low.
According to the optimization of the vacuum coating machine multi-rotary blade comparison device, it ensures the coordination and repeated consistency of the rotation of the relative blade structure, and solves the problem that the relative area is small, the loop adjustment is inconvenient, and the optical signal frequency is stable. It solves the problem of poor latitude and solves the problem of less total number of sheets, which can further improve the quality of optical films coated by the original vacuum coating machine, and more than 30 layers of optical films can be coated. Practical experience has proved that this comparative sheet structure is effective and can be well marketed and implemented in the field of electronic optical vacuum coating machines today.